Example 1Optimum design and construction to customer specification, e. g.: Drying chamber with nitrogen purging
Operating area:- Thermal treatment of wafer discs for semi conductor production
Specification:
- Electronic programme controller KS 94 (operating temperature up to 550°C max.)
with 3 programmes
- Programmable start and programme selection
- Electronic protection against over temperature
- Heat capacity 10kW
- Circuit breaker solid State relay
- Band Heater monitoring (max. 700°C)
- Actual value exit over flange-box
- Stainless steel cylinder (1.4571) drying chamber with heat cool ceramic system
- Double blower for fast cooling of the interior temperature
- Flow metering for both nitrogen and oxygen with 2/2 to road valves. The control takes
place about rest switch or program control
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